Silicon wafers
Which method irradiates FZ silicon with neutrons to convert some silicon into phosphorus, making it uniformly n-type?
- ANeutron transmutation doping (NTD)
- BIon implantation
- CThermal diffusion
Show answer and explanation
Answer: A. Neutron transmutation doping (NTD)
When silicon is irradiated with neutrons, some silicon (Si-30) absorbs a neutron to become Si-31, which decays into phosphorus. Phosphorus forms uniformly throughout the crystal, giving n-type wafers with very little resistivity variation, used for high-voltage power devices.