Silicon wafers

Which method is used to measure wafer resistivity without contact?

  1. ASIMS
  2. BTEM observation
  3. CMeasurement using eddy currents
Show answer and explanation

Answer: C. Measurement using eddy currents

Applying an AC magnetic field induces eddy currents in the wafer, whose magnitude depends on conductivity. Detecting them allows resistivity (sheet resistance) to be measured without touching the wafer. Unlike the four-point probe, which uses needles, it does not damage the surface, so it is used for incoming inspection.

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