Silicon wafers
Which conditions are mainly adjusted during pulling to keep the diameter of a silicon single-crystal ingot constant?
- AThe pull rate and melt temperature
- BThe color of the ingot
- CThe brightness of the fab lighting
Show answer and explanation
Answer: A. The pull rate and melt temperature
In the CZ method, the region where the crystal meets the melt is monitored with cameras, and the pull rate and heater power (melt temperature) are adjusted to keep the diameter constant. The pull rate affects not only the diameter but also the defects incorporated into the crystal.