Cleanrooms and equipment

Which equipment is installed in semiconductor fabs to prevent loss of wafers in process due to voltage sags or power outages?

  1. AULPA filters
  2. BUninterruptible power supplies (UPS) and voltage-sag protection equipment
  3. CFOUPs
Show answer and explanation

Answer: B. Uninterruptible power supplies (UPS) and voltage-sag protection equipment

Semiconductor equipment stops even with a momentary voltage drop, which can ruin wafers in process and make restarting equipment time-consuming. Critical equipment and facilities therefore have uninterruptible power supplies and voltage-sag protection so the power supply is not interrupted.

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More Cleanrooms and equipment questions

  1. Which ISO 14644-1 cleanliness class corresponds to Class 100 of the former US federal standard (no more than 100 particles of 0.5 µm or larger per cubic foot)?
  2. What is a typical guideline for the air velocity blown from the ceiling in downflow cleanrooms?
  3. In bay-and-chase cleanrooms, how is the cleanliness of the maintenance space behind equipment (the chase) typically handled?
  4. Which element can be released from glass-fiber filters and similar sources and cause unintended doping (contamination) of wafers?
  5. Which is closest to the typical temperature setting of a cleanroom?