Cleanrooms and equipment
In bay-and-chase cleanrooms, how is the cleanliness of the maintenance space behind equipment (the chase) typically handled?
- AIt is controlled at the highest cleanliness in the fab
- BIt is given the same environment as outdoors
- CIt is often controlled at lower cleanliness than the work areas (bays) where wafers are handled
Show answer and explanation
Answer: C. It is often controlled at lower cleanliness than the work areas (bays) where wafers are handled
In the bay-and-chase approach, work areas (bays) where wafers are handled are kept at high cleanliness, while the maintenance space behind equipment (chase) is often controlled at lower cleanliness. Zoning cleanliness this way reduces construction and operating costs.