Cleanrooms and equipment

Which is closest to the typical temperature setting of a cleanroom?

  1. AAbout 5 °C
  2. BAbout 23 °C
  3. CAbout 40 °C
Show answer and explanation

Answer: B. About 23 °C

Cleanroom temperature is generally set around 23 °C, considering worker comfort and the stability of equipment and processes. Around exposure tools and similar areas, temperature fluctuation is controlled within an even narrower range.

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More Cleanrooms and equipment questions

  1. Which instrument is used to measure the number and size of fine particles in cleanroom air?
  2. Which item, placed on the floor at cleanroom entrances and elsewhere, removes dust stuck to shoe soles?
  3. Which statement about the amount of particles shed by cleanroom workers is correct?
  4. As circuits are scaled down, how does the size of particles that must be controlled in the cleanroom change?
  5. What is the main reason wafers must not be touched with bare hands?