Cleanrooms and equipment

Which element can be released from glass-fiber filters and similar sources and cause unintended doping (contamination) of wafers?

  1. ABoron
  2. BGold
  3. CIron
Show answer and explanation

Answer: A. Boron

HEPA filters using glass fiber and similar sources can release boron-containing gases, which may adhere to wafer surfaces and cause unintended doping as a p-type impurity. Low-boron filters and chemical filters are therefore used.

Practice this topic Back to topic

More Cleanrooms and equipment questions

  1. Which is closest to the typical temperature setting of a cleanroom?
  2. Which instrument is used to measure the number and size of fine particles in cleanroom air?
  3. Which item, placed on the floor at cleanroom entrances and elsewhere, removes dust stuck to shoe soles?
  4. Which statement about the amount of particles shed by cleanroom workers is correct?
  5. As circuits are scaled down, how does the size of particles that must be controlled in the cleanroom change?