Cleanrooms and equipment

What is used with precision equipment such as exposure tools to suppress the effects of vibration transmitted from the floor?

  1. AVibration isolation tables (such as active vibration isolation systems)
  2. BHumidifiers
  3. CFOUPs
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Answer: A. Vibration isolation tables (such as active vibration isolation systems)

Precision equipment such as exposure tools and electron microscopes loses accuracy with even slight vibration. It is therefore installed on vibration isolation tables using springs, air springs, or active systems controlled to cancel vibration. Fab buildings are also designed with low-vibration structures.

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  1. Which device supplies ions to the air in a cleanroom to neutralize charge on wafers and equipment?
  2. Which unit at the front of process equipment opens FOUP doors and transfers wafers into the equipment while keeping them in a clean environment?
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