Cleanrooms and equipment

What is the main reason temperature is held extremely constant in cleanrooms, especially in exposure areas?

  1. AOnly for worker comfort
  2. BTo prevent misalignment and dimensional errors caused by thermal expansion of wafers and equipment
  3. CTo make the lighting brighter
Show answer and explanation

Answer: B. To prevent misalignment and dimensional errors caused by thermal expansion of wafers and equipment

Silicon and equipment parts expand and contract slightly with temperature. Exposure requires overlay accuracy on the nanometer scale, so even a slight temperature change can cause misalignment. Temperature around exposure tools and similar areas is therefore controlled within a very narrow range.

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More Cleanrooms and equipment questions

  1. What is used with precision equipment such as exposure tools to suppress the effects of vibration transmitted from the floor?
  2. Which device supplies ions to the air in a cleanroom to neutralize charge on wafers and equipment?
  3. Which unit at the front of process equipment opens FOUP doors and transfers wafers into the equipment while keeping them in a clean environment?
  4. Which correctly describes the properties required of cleanroom suits?
  5. Which device, arrayed on the ceiling, integrates a filter and fan to deliver clean air?