Process materials (gases and chemicals)

Which set correctly lists the main kinds of process materials used in semiconductor manufacturing?

  1. AWafers, gases, wet chemicals, photoresist, sputtering targets, CMP slurries and so on
  2. BWood, paper and cloth
  3. CGasoline, diesel and kerosene
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Answer: A. Wafers, gases, wet chemicals, photoresist, sputtering targets, CMP slurries and so on

Besides the wafers that serve as substrates, semiconductor manufacturing uses many high-purity materials: gases for deposition and etching, chemicals for cleaning and etching, photoresist for exposure, sputtering targets, and CMP slurries and pads.

  • A. Correct. Wafers, gases, chemicals, resist, targets, slurries and so on.
  • B. Wood, paper and cloth are not semiconductor process materials.
  • C. Fuels are not process materials.
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More Process materials (gases and chemicals) questions

  1. What is the appropriate general way to store photoresist?
  2. For what purpose is ultrapure water used in the largest quantities in semiconductor fabs?
  3. What is the main reason extremely high purity is required of the gases and chemicals used in semiconductor manufacturing?
  4. Which combination of material and surface treatment is commonly used for high-purity gas piping?
  5. Which device in deposition and etch tools precisely measures gas flow and controls it to stay constant?