Process materials (gases and chemicals)

What is the appropriate general way to store photoresist?

  1. AKeep it in a bright, sunny place
  2. BKeep it in a light-tight container at the specified temperature (such as refrigerated) and use it before its expiration date
  3. CStore it open at room temperature
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Answer: B. Keep it in a light-tight container at the specified temperature (such as refrigerated) and use it before its expiration date

Photoresist is a photosensitive material whose properties change with light and heat, so it is kept in light-tight containers at the specified temperature, such as refrigerated. Its sensitivity and other properties drift over time, so using it within its shelf life is also important.

  • A. Light reacts with the resist and degrades it.
  • B. Correct. It is kept dark at the specified temperature.
  • C. Leaving it open lets solvent evaporate and contaminants enter.
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More Process materials (gases and chemicals) questions

  1. For what purpose is ultrapure water used in the largest quantities in semiconductor fabs?
  2. What is the main reason extremely high purity is required of the gases and chemicals used in semiconductor manufacturing?
  3. Which combination of material and surface treatment is commonly used for high-purity gas piping?
  4. Which device in deposition and etch tools precisely measures gas flow and controls it to stay constant?
  5. What is the main composition of positive resists widely used for g-line and i-line exposure?