Lithography

What is the range of exposure dose and focus over which pattern dimensions stay within tolerance called?

  1. AProcess window
  2. BOverlay
  3. CLine edge roughness
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Answer: A. Process window

The process window shows how much variation in dose and focus can be tolerated. In production, dose and focus vary because of tool variation and wafer topography, so a wider process window means more stable manufacturing. OPC and illumination optimization are done to widen it.

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