LSI design flow and EDA
For layouts intended for double patterning, which correctly describes how design tools assign patterns?
- APut all patterns on a single mask
- BDelete patterns at random
- CSplit patterns between two masks (coloring) so that patterns on the same mask are not too close
Show answer and explanation
Answer: C. Split patterns between two masks (coloring) so that patterns on the same mask are not too close
In double patterning, patterns spaced too closely to resolve in a single exposure are split between two masks and exposed separately. Design tools color the patterns so that patterns too close to each other go on different masks, and flag any arrangement that cannot be colored as an error to be fixed.