Yield and quality control

What is the analysis called that statistically identifies, from the manufacturing histories of many lots, the tools, chambers, materials and the like commonly used by low-yield lots?

  1. AEquivalent circuit analysis
  2. BCommonality analysis
  3. CRaman spectroscopy
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Answer: B. Commonality analysis

Commonality analysis compares the manufacturing histories of high-defect lots with normal lots and statistically searches for tools, chambers, materials, time periods and so on shared by the bad lots. It is effective for narrowing candidate causes among many process steps.

  • A. Equivalent circuit analysis builds models representing circuit behavior.
  • B. Correct. It identifies factors common to bad lots.
  • C. Raman spectroscopy is a spectroscopic method for measuring stress and the like.
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More Yield and quality control questions

  1. Which statistical process control technique monitors several mutually correlated characteristics together, rather than one at a time, to detect abnormal combinations?
  2. When there are several tools of the same type, what is it called to adjust and manage them so that processing results differ little between tools and chambers?
  3. A wafer yields 500 chips, of which 450 are good. What is the yield of this wafer?
  4. With the same defect density, what generally happens to yield when chip area is increased?
  5. In control charts (Shewhart control charts) used for process control, how are the control limits generally set?