Yield and quality control

When there are several tools of the same type, what is it called to adjust and manage them so that processing results differ little between tools and chambers?

  1. ALithography
  2. BChamber matching
  3. CGettering
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Answer: B. Chamber matching

Volume fabs run the same step in parallel on many tools and chambers, so differences in their results spread product characteristics. Adjusting and monitoring to align part conditions, sensor values and process results is called chamber matching and is essential for reducing variation.

  • A. Lithography is the pattern transfer step.
  • B. Correct. It is adjustment and management to minimize tool-to-tool differences.
  • C. Gettering is a technique for capturing harmful impurities.
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More Yield and quality control questions

  1. A wafer yields 500 chips, of which 450 are good. What is the yield of this wafer?
  2. With the same defect density, what generally happens to yield when chip area is increased?
  3. In control charts (Shewhart control charts) used for process control, how are the control limits generally set?
  4. Which correctly describes the purpose of a Pareto chart used in quality control?
  5. Which formula gives the process capability index Cp (when the process mean coincides with the center of the specification)? (σ: process standard deviation)