MEMS and sensors

Which MEMS sensor measures flow rate using the fact that gas flow carries away heat from a heater?

  1. AThermal flow sensor
  2. BHall element
  3. CDMD
Show answer and explanation

Answer: A. Thermal flow sensor

A thermal flow sensor places a heater and upstream and downstream temperature sensors on a thin membrane and determines flow rate from the change in temperature distribution caused by gas flow. It is small and responds quickly, and is used in gas meters, medical equipment and engine intake measurement.

Practice this topic Back to topic

More MEMS and sensors questions

  1. What is an advantage of RF MEMS switches, which switch RF signals by mechanically opening and closing contacts?
  2. Which temperature sensor uses the property that its electrical resistance changes greatly with temperature?
  3. Which is the most appropriate scale for the movable structures made by MEMS?
  4. What is the principle of the optical sensor that measures heart rate at the wrist in smartwatches and similar devices?
  5. Which sensor does a smartphone use to automatically adjust screen brightness to its surroundings?