MEMS and sensors

What is an advantage of MEMS oscillators, sometimes used instead of quartz crystals as clock sources?

  1. ATheir frequency stability is always better than quartz
  2. BBecause they are made with semiconductor processes, they are small, shock-resistant and easy to integrate with ICs
  3. CThey are large and easy to handle
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Answer: B. Because they are made with semiconductor processes, they are small, shock-resistant and easy to integrate with ICs

A MEMS oscillator combines a tiny silicon resonator with drive and temperature-compensation circuits and can be mass-produced with semiconductor processes. It is small, resistant to shock and vibration and easy to package, so it is used instead of quartz crystals in some applications.

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More MEMS and sensors questions

  1. Which MEMS sensor measures flow rate using the fact that gas flow carries away heat from a heater?
  2. What is an advantage of RF MEMS switches, which switch RF signals by mechanically opening and closing contacts?
  3. Which temperature sensor uses the property that its electrical resistance changes greatly with temperature?
  4. Which is the most appropriate scale for the movable structures made by MEMS?
  5. What is the principle of the optical sensor that measures heart rate at the wrist in smartwatches and similar devices?