MEMS and sensors

Which statement correctly describes detecting very small masses by using the change in resonant frequency when material adheres to a tiny cantilever or a quartz crystal resonator?

  1. AAs adsorbed mass increases, the resonant frequency rises
  2. BAs adsorbed mass increases, the resonant frequency falls, and the mass is found from the change
  3. CThe resonant frequency is unrelated to mass
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Answer: B. As adsorbed mass increases, the resonant frequency falls, and the mass is found from the change

The resonant frequency is proportional to √(k/m), so when material adheres and the mass m increases, the frequency drops. The smaller and lighter the resonator, the larger the frequency change for a tiny mass change, so this is used to detect gas or biological molecules and to monitor film thickness (quartz crystal microbalance).

  • A. Increasing mass lowers the resonant frequency.
  • B. Correct. The adsorbed mass is found from the frequency drop.
  • C. The resonant frequency depends on mass.
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