Emerging memories
In which process of a logic LSI is the MRAM storage element (MTJ) generally built?
- ABetween wiring layers in the interconnect (BEOL) process
- BWhen the silicon wafer is manufactured
- CAfter assembly into a package
Show answer and explanation
Answer: A. Between wiring layers in the interconnect (BEOL) process
MTJs are formed between wiring layers in the interconnect process, after the transistors have been made. They can be integrated without major changes to the transistor process, which makes it easy to embed non-volatile memory in logic LSIs. They must, however, withstand the heat treatments of the interconnect process.