Yield and quality control
What is the purpose of inspecting for defects after each step and extracting only the defects newly added since the previous step?
- ATo identify in which step (equipment) the defects occurred
- BTo set chip prices
- CTo make wafer colors uniform
Show answer and explanation
Answer: A. To identify in which step (equipment) the defects occurred
Comparing defect inspection results step by step and subtracting defects found in the previous inspection reveals defects newly generated in the intervening steps. This allows the step or equipment generating defects to be identified and addressed.