Reliability

In thin gate oxides, what is the mild breakdown called in which leakage current increases in steps before insulation is completely lost?

  1. AHard breakdown
  2. BElectromigration
  3. CSoft breakdown
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Answer: C. Soft breakdown

In very thin gate oxides, continued stress can first cause soft breakdown, in which local conductive paths form and leakage current increases in steps. It may then progress to hard breakdown, in which insulation is completely lost. Depending on the circuit, operation can continue even after soft breakdown.

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