Semiconductor physics
How does carrier mobility generally change when the impurity concentration in silicon is increased?
- AIt does not change
- BIt decreases
- CIt increases
Show answer and explanation
Answer: B. It decreases
Higher doping increases Coulomb scattering by ionized impurities, so mobility drops. For electrons in silicon it falls from about 1350 cm²/V·s at 10¹⁵ cm⁻³ to roughly 100 cm²/V·s at 10¹⁹ cm⁻³, so resistivity falls less than the doping rises. This is one reason MOSFET channels should be lightly doped, and FinFETs and GAA devices can use undoped channels.
- A. Impurity concentration strongly affects mobility.
- B. Correct. Ionized impurity scattering increases and mobility drops.
- C. More impurities mean more scattering, so mobility does not increase.