MEMS and sensors

Which is the most appropriate scale for the movable structures made by MEMS?

  1. ASeveral meters
  2. BSeveral micrometers to several millimeters
  3. CSeveral picometers
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Answer: B. Several micrometers to several millimeters

MEMS uses semiconductor microfabrication to build mechanical structures (springs, masses, membranes, mirrors and so on) ranging from micrometers to millimeters in size, together with electronic circuits. They are far larger than atoms (tens to hundreds of picometers) but smaller than parts visible to the naked eye.

  • A. Several meters is the size of ordinary machines.
  • B. Correct. They range from micrometers to millimeters.
  • C. Several picometers is smaller than an atom; no structure can be made at that size.
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More MEMS and sensors questions

  1. What is the principle of the optical sensor that measures heart rate at the wrist in smartwatches and similar devices?
  2. Which sensor does a smartphone use to automatically adjust screen brightness to its surroundings?
  3. What is the general principle of the sensor a smartphone uses to turn off the screen when your face approaches during a call, preventing accidental touches?
  4. What is the driving principle of the "comb-drive" structure used as a MEMS actuator?
  5. Which device uses acoustic waves traveling along the surface of a piezoelectric substrate and serves as a high-frequency filter in smartphones and similar?