Yield and quality control

What is the system called that monitors equipment sensor data (temperature, pressure, power and so on) during processing, detects unusual states and flags abnormalities early?

  1. ACMP
  2. BMES
  3. CFDC (fault detection and classification)
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Answer: C. FDC (fault detection and classification)

FDC (fault detection and classification) collects tool sensor data in real time, detects deviations from normal, raises alarms and classifies the type of abnormality. Because it can notice problems before product is measured, it prevents mass production of defects.

  • A. CMP is a planarizing polishing step.
  • B. MES manages the production flow in a factory.
  • C. Correct. Tool data are used to detect abnormalities early.
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More Yield and quality control questions

  1. Which metric evaluates equipment productivity by multiplying the fraction of time running, the performance (speed) and the good-product rate?
  2. In a semiconductor fab, what is the time from wafer start to completion called?
  3. Which control chart monitors shifts in a process's mean and changes in its spread at the same time by plotting each sample group's mean and range (max − min) over time?
  4. Which system manages which lot is at which step and tool, under what conditions it was processed and so on, directing and recording the production flow in a factory?
  5. In sampling inspection, which judges an entire lot as accepted or rejected by inspecting a sample, which metric expresses the quality level considered acceptable?