Oxidation and diffusion

Which set represents the commonly used classification of charges in and at the interface of the oxide in a MOS structure?

  1. AFixed charge, mobile ionic charge, oxide trapped charge and interface trapped charge
  2. BDC charge, AC charge and static charge
  3. CHole charge, electron charge and neutral charge
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Answer: A. Fixed charge, mobile ionic charge, oxide trapped charge and interface trapped charge

Charges around the oxide are classified into four types: fixed charge near the interface, mobile ionic charge such as sodium, oxide trapped charge captured by defects in the film, and interface trapped charge due to interface states. All of them shift the flat-band and threshold voltages.

  • A. Correct. They are classified into these four types.
  • B. This classification is not used.
  • C. This classification is not used.
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More Oxidation and diffusion questions

  1. In the Deal-Grove model, what is the relationship between oxide thickness and time early in thermal oxidation, while the oxide is still thin?
  2. Which generally describes the thickness relationship between the field oxide used for isolation such as LOCOS and the gate oxide of a MOSFET?
  3. What is the common definition of the "junction depth" of a PN junction?
  4. What is the phenomenon called in which boron and phosphorus diffuse faster during silicon oxidation than without oxidation?
  5. When thin oxides of a few tens of nanometers or less are grown by dry oxidation, which known deviation from the Deal-Grove model occurs?