MEMS and sensors

Which method is widely used to evaluate the bias stability (slow drift of the output) of MEMS gyroscopes?

  1. AAllan variance (Allan deviation) analysis
  2. BC-V measurement
  3. CFour-point probe method
Show answer and explanation

Answer: A. Allan variance (Allan deviation) analysis

Allan variance analyzes the output recorded over a long time at rest by dividing it into various averaging times and examining the size of fluctuations. The shape of the plot separates components such as random noise (angle random walk) and bias instability, so it is used to evaluate gyroscopes and oscillators.

  • A. Correct. Allan variance evaluates noise and bias drift.
  • B. C-V measurement evaluates the capacitance of MOS structures and the like.
  • C. The four-point probe measures the resistivity of films and wafers.
Practice this topic Back to topic

More MEMS and sensors questions

  1. What is the damping called that arises when a MEMS movable plate moves toward a nearby fixed surface and squeezes out the gas between them?
  2. In very small MEMS accelerometers and gyroscopes, which noise, caused by the proof mass jiggling randomly through thermal interaction with surrounding gas molecules and the like, is one limit on resolution?
  3. Which statement correctly describes detecting very small masses by using the change in resonant frequency when material adheres to a tiny cantilever or a quartz crystal resonator?
  4. Which correctly describes MEMS?
  5. What is the principle by which a capacitive MEMS accelerometer detects acceleration?