The fabrication process
Follow the front-end process in order: wafers, cleanrooms, oxidation, lithography, etching, deposition, interconnects, metrology and yield.
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Silicon wafers
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Cleanrooms and equipment
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Process materials (gases and chemicals)
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Oxidation and diffusion
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Ion implantation
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Epitaxial growth
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Lithography
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Etching
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Deposition (CVD and PVD)
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CMP and cleaning
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Interconnect processes
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Metrology and analysis
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Yield and quality control
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A topic counts as done when you have answered at least 60% of its questions with 80% or higher accuracy.